C.T. Male Associates Survey Division is the oldest in the firm and dates to the firm’s founding in 1910. The Survey Division staff includes 10 licensed surveyors, 2 FAA licensed drone operators, High Definition Laser Scanner trained technicians, numerous survey crews and staff trained in the use of specialized equipment used for industrial metrology.
“Industrial metrology is the application of measurement to manufacturing and other processes and their use in society, ensuring the suitability of measurement instruments, their calibration and quality control.”
C.T. Male Associates Survey Division has developed a unique method of precise survey control using industrial metrology. This method was used to perform a control survey for a semiconductor manufacturer. Highly accurate control is required for the layout and installation of the tools in the Fa b , in relation to the Automated Material Handling Systems (AMHS) , and the utility connections in the Sub Fab area.
The survey control accuracy required for this work was± 3-millimeters level accuracy (the equivalent of the thickness of two pennies), which presented a unique challenge. Traditional survey equipment accuracy is ± 5-10 millimeters and ± 6 millimeters using a laser scanner.
After much research , the decision was made to use a Leica Laser Tracker which is an industrial metrology device that is used throughout the world to precisely measure equipment and structures, align particle accelerators, and fine-tune robots and machinery. Not only was this a cost-effective way to perform this work, it was also extremely accurate. Final accuracy achieved was 0.4mm or the width of about 4 human hairs.
- Survey for layout & installation of tools for a semiconductor manufacturer
- Required accuracy of ±3 millimeters
- Accuracy achieved 0.4 millimeters